Description

  • AMAT Part No :
    0190-15840 4-PORT UPA, DNET ONLY, 300MM LK
    0190-24854 MKS REV3.0 G4 PLUS 4-PORT UPA

Applicable System

  • AMAT CMP REFLECTION 300mm
  • AMAT CMP REFLECTION LK 300mm

Test Items

  • Pressure Test for each Zone
  • Vacuum Test for each Zone
  • Block and Vent Test

Check Point

  • Check pressure and Vacuum stabilization
  • Leak check for all valve.(Proportional, vent, vacuum, bleed valve leak)
  • Check Valve and Baratron guage working condition.

Repair Contents

  • Proportional Valve
  • Vent Valve
  • Water rated Vacuum Valve
  • Bleed Valve
  • MKS Baratron gauge