Description
-
AMAT Part No :
0190-15840 4-PORT UPA, DNET ONLY, 300MM LK
0190-24854 MKS REV3.0 G4 PLUS 4-PORT UPA
Applicable System
- AMAT CMP REFLECTION 300mm
- AMAT CMP REFLECTION LK 300mm
Test Items
- Pressure Test for each Zone
- Vacuum Test for each Zone
- Block and Vent Test
Check Point
- Check pressure and Vacuum stabilization
- Leak check for all valve.(Proportional, vent, vacuum, bleed valve leak)
- Check Valve and Baratron guage working condition.
Repair Contents
- Proportional Valve
- Vent Valve
- Water rated Vacuum Valve
- Bleed Valve
- MKS Baratron gauge