CMP MKS UPA Repair Service
Description
-
AMAT Part No :
0190-15840 4-PORT UPA, DNET ONLY, 300MM LK
0190-24854 MKS REV3.0 G4 PLUS 4-PORT UPA
Applicable System
-
AMAT CMP REFLECTION 300mm
-
AMAT CMP REFLECTION LK 300mm
Test Items
-
Pressure Test for each Zone
-
Vacuum Test for each Zone
-
Block and Vent Test
Check Point
-
Check pressure and Vacuum stabilization
-
Leak check for all valve.(Proportional, vent, vacuum, bleed valve leak)
-
Check Valve and Baratron guage working condition.
Repair Contents
-
Proportional Valve
-
Vent Valve
-
Water rated Vacuum Valve
-
Bleed Valve
-
MKS Baratron gauge