Model Number
- Kawasaki Model No
- AMAT Part No
- 3NS411B-F001
- 0190-10555
- 3NS411B-F003
- 0190-16621
- 3NS411B-F004
- 0190-28740
- 3NS411B-F004
- 0190-29005
Applicable System
- AMAT CMP REFLECTION 300mm
- AMAT CMP REFLECTION LK 300mm
Applicable Controller
- Kawasaki Model No.
- AMAT Part No.
- 30C61E-B003
- 0190-12697
- 30C61E-B014
- 0190-17941
- 30C61E-B017
- 0190-25866
- 30C61E-B019
- 0190-25867
- 30C61E-B026
- 0190-34968
- 30D61I-A005
- 0190-27376
Service Program
Full Repair Service (FRS)
- Overhaul
-
Repair of failure mode and
replace all consumable parts - 6 weeks lead-time
Exchange Program (ExP)
- Swap program with seed stock
- 1 days lead-time (Stock on site)
Test Details
- Blade Flatness Test
- Wafer Transfer Test
- Motion Range Confirmation
- Input/output Signal Confirmation
- Motion Repetition Test with Laser Sensor
- Hand Unit Linier Test with Laser Microscope
