Kawasaki FI Robot 3NS411B
Model Number
-
Kawasaki Model No
-
AMAT Part No
-
3NS411B-F001
-
0190-10555
-
3NS411B-F003
-
0190-16621
-
3NS411B-F004
-
0190-28740
-
3NS411B-F004
-
0190-29005
Applicable System
-
AMAT CMP REFLECTION 300mm
-
AMAT CMP REFLECTION LK 300mm
Applicable Controller
-
Kawasaki Model No.
-
AMAT Part No.
-
30C61E-B003
-
0190-12697
-
30C61E-B014
-
0190-17941
-
30C61E-B017
-
0190-25866
-
30C61E-B019
-
0190-25867
-
30C61E-B026
-
0190-34968
-
30D61I-A005
-
0190-27376
Service Program
Full Repair Service (FRS)
-
Overhaul
-
Repair of failure mode and
replace all consumable parts
-
6 weeks lead-time
Exchange Program (ExP)
-
Swap program with seed stock
-
1 days lead-time (Stock on site)
Test Details
-
Blade Flatness Test
-
Wafer Transfer Test
-
Motion Range Confirmation
-
Input/output Signal Confirmation
-
Motion Repetition Test with Laser Sensor
-
Hand Unit Linier Test with Laser Microscope