Model Number

  • Kawasaki Model No
  • AMAT Part No
  • 3NS411B-F001
  • 0190-10555
  • 3NS411B-F003
  • 0190-16621
  • 3NS411B-F004
  • 0190-28740
  • 3NS411B-F004
  • 0190-29005

Applicable System

  • AMAT CMP REFLECTION 300mm
  • AMAT CMP REFLECTION LK 300mm

Applicable Controller

  • Kawasaki Model No.
  • AMAT Part No.
  • 30C61E-B003
  • 0190-12697
  • 30C61E-B014
  • 0190-17941
  • 30C61E-B017
  • 0190-25866
  • 30C61E-B019
  • 0190-25867
  • 30C61E-B026
  • 0190-34968
  • 30D61I-A005
  • 0190-27376

Service Program

Full Repair Service (FRS)

  • Overhaul
  • Repair of failure mode and
    replace all consumable parts
  • 6 weeks lead-time

Exchange Program (ExP)

  • Swap program with seed stock
  • 1 days lead-time (Stock on site)

Test Details

  • Blade Flatness Test
  • Wafer Transfer Test
  • Motion Range Confirmation
  • Input/output Signal Confirmation
  • Motion Repetition Test with Laser Sensor
  • Hand Unit Linier Test with Laser Microscope