Model Number

  • Kawasaki Model No
  • AMAT Part No
  • 3NS410B-A002
  • 0190-05090
  • 3NS410B-A004
  • 0190-10300
  • 3NS410B-A004
  • 0190-11270
  • 3NS410B-A004
  • 0190-11279
  • 3NS410B-A005
  • 0190-16618
  • 3NS410B-A104
  • 0190-11290
  • 3NS410B-A104
  • 0190-11291
  • 3NS410B-A104
  • 0190-11292
  • 3NS410B-A105
  • 0190-16619
  • 3NS410B-A014
  • 0190-12314
  • 3NS410B-A205
  • 0190-16620
  • 3NS410B-A205
  • 0190-17472
  • 3NS410B-A304
  • 0190-14299
  • 3NS410B-A305
  • 0190-15444
  • 3NS410B-A314
  • 0190-15381
  • 3NS410B-A504
  • 0190-11367
  • 3NS410B-A505
  • 0190-16622
  • 3NS410B-A604
  • 0190-11368
  • 3NS410B-A605
  • 0190-16623
  • 3NS410B-B501
  • 0190-24909

Applicable System

  • AMAT PRODUCER SE CVD 300mm
  • AMAT CENTURA HDPCVD 300mm
  • AMAT CENTURA ETCH 300mm
  • AMAT CENTURA ETCH 200mm Bridge tool

Applicable Controller

  • Kawasaki Model No
  • AMAT Part No
  • 30C61D-B001
  • 0190-12378
  • 30C61D-B002
  • 0190-12377
  • 30C61D-B003
  • 0190-10319
  • 30C61D-B004
  • 0190-27379
  • 30C61D-B005
  • 0190-10964
  • 30C61D-B015
  • 0190-25863
  • 30C61D-B016
  • 0190-25864
  • 30C61D-B018
  • 0190-25865
  • 30C61D-B021
  • 0190-27243
  • 30C61D-B022
  • 0190-25868
  • C61C-B004
  • 0190-08175

Service Program

Full Repair Service (FRS)

  • Overhaul
  • Repair of failure mode and
    replace all consumable parts
  • 6 weeks lead-time

Exchange Program (ExP)

  • Swap program with seed stock
  • 1 days lead-time (Stock on site)

Test Details

  • Blade Flatness Test
  • Wafer Transfer Test
  • Motion Range Confirmation
  • Input/output Signal Confirmation
  • Motion Repetition Test with Laser Sensor
  • Hand Unit Linier Test with Laser Microscope