Description

  • Kawasaki Model No
  • AMAT Part No
  • 3NS511C-F001
  • 0190-10315
  • 3NS511C-F101 (Cu)
  • 0190-
  • 3NS511C-F003
  • 0190-10376
  • 3NS511C-F103(Cu)
  • 0190-
  • 3NS511C-G003
  • 0190-26267

Applicable System

  • AMAT CMP REFLECTION 300mm
  • AMAT CMP REFLECTION LK 300mm

Applicable Controller

  • Kawasaki Model No
  • AMAT Part No
  • 30C61D-B021
  • 0190-27243
  • 30C61D-B005
  • 0190-10964
  • 30D61I-A005
  • 0190-27376

Service Program

Full Repair Service (FRS)

  • Overhaul
  • Repair of failure mode and
    replace all consumable parts
  • 6 weeks lead-time

Exchange Program (ExP)

  • Swap program with seed stock
  • 1 days lead-time (Stock on site)

Test Details

  • Blade Flatness Test
  • Wafer Transfer Test
  • Motion Range Confirmation
  • Input/output Signal Confirmation
  • Motion Repetition Test with Laser Sensor
  • Hand Unit Linier Test with Laser Microscope