Description

  • Kawasaki Model No
  • NANO Part No
  • 3NS420B
  • N/A

Applicable System

  • NANO METRICS

Applicable Controller

  • Kawasaki Model No
  • NANO Part No
  • 30C61E-B014
  • N/A

Service Program

Full Repair Service (FRS)

  • Overhaul
  • Repair of failure mode and
    replace all consumable parts
  • 6 weeks lead-time

Test Details

  • Blade Flatness Test
  • Wafer Transfer Test
  • Motion Range Confirmation
  • Input/output Signal Confirmation
  • Motion Repetition Test with Laser Sensor
  • Hand Unit Linier Test with Laser Microscope