Kawasaki FI Robot 3NX510B
Description
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Kawasaki Model No
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AMAT Part No
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3NX510B-D001
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0190-24965
Applicable System
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AMAT PRODUCER GT CVD 300mm
Applicable Controller
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Kawasaki Model No
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AMAT Part No
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30C61H-A002
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0190-25026
Service Program
Full Repair Service (FRS)
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Overhaul
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Repair of failure mode and
replace all consumable parts
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6 weeks lead-time
Exchange Program (ExP)
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Swap program with seed stock
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1 days lead-time (Stock on site)
Test Details
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Blade Flatness Test
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Wafer Transfer Test
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Motion Range Confirmation
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Input/output Signal Confirmation
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Motion Repetition Test with Laser Sensor
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Hand Unit Linier Test with Laser Microscope