Description
- Kawasaki Model No
- AMAT Part No
- 3NX510B-D001
- 0190-24965
Applicable System
- AMAT PRODUCER GT CVD 300mm
Applicable Controller
- Kawasaki Model No
- AMAT Part No
- 30C61H-A002
- 0190-25026
Service Program
Full Repair Service (FRS)
- Overhaul
-
Repair of failure mode and
replace all consumable parts - 6 weeks lead-time
Exchange Program (ExP)
- Swap program with seed stock
- 1 days lead-time (Stock on site)
Test Details
- Blade Flatness Test
- Wafer Transfer Test
- Motion Range Confirmation
- Input/output Signal Confirmation
- Motion Repetition Test with Laser Sensor
- Hand Unit Linier Test with Laser Microscope
