Description

  • Kawasaki Model No
  • AMAT Part No
  • 3NX510B-D001
  • 0190-24965

Applicable System

  • AMAT PRODUCER GT CVD 300mm

Applicable Controller

  • Kawasaki Model No
  • AMAT Part No
  • 30C61H-A002
  • 0190-25026

Service Program

Full Repair Service (FRS)

  • Overhaul
  • Repair of failure mode and
    replace all consumable parts
  • 6 weeks lead-time

Exchange Program (ExP)

  • Swap program with seed stock
  • 1 days lead-time (Stock on site)

Test Details

  • Blade Flatness Test
  • Wafer Transfer Test
  • Motion Range Confirmation
  • Input/output Signal Confirmation
  • Motion Repetition Test with Laser Sensor
  • Hand Unit Linier Test with Laser Microscope