Description

  • Kawasaki Model No
  • AMAT Part No
  • 3NX540B-A301
  • 0190-15027
  • 3NX540B-A302
  • 0190-24327
  • 3NX540B-A303
  • 0190-27392

Applicable System

  • AMAT CENTURA ETCH 300mm

Applicable Controller

  • Kawasaki Model No
  • AMAT Part No.
  • 30C65E-A001
  • 0190-17831
  • 30D60E-A007
  •  

Service Program

Full Repair Service (FRS)

  • Overhaul
  • Repair of failure mode and
    replace all consumable parts
  • 6 weeks lead-time

Exchange Program (ExP)

  • Swap program with seed stock
  • 1 days lead-time (Stock on site)

Test Details

  • Blade Flatness Test
  • Wafer Transfer Test
  • Motion Range Confirmation
  • Input/output Signal Confirmation
  • Motion Repetition Test with Laser Sensor
  • Hand Unit Linier Test with Laser Microscope